PROGRAM
Days: Sunday, September 14th Monday, September 15th Tuesday, September 16th Wednesday, September 17th Thursday, September 18th Friday, September 19th
Sunday, September 14th
View this program: with abstractssession overviewtalk overview
Monday, September 15th
View this program: with abstractssession overviewtalk overview
08:30-08:40 Opening
Location: Auditorium
08:40-09:25 Session 1: Plenary Lecture 1
Location: Auditorium
08:40 | Unlocking New Possibilities: Power Devices and the Future of Semiconductors (abstract) |
09:25-09:45 Session 2: Invited Posters
Chair:
Location: Auditorium
09:25 | Possible interaction between basal plane dislocations and point defects in physical vapor transport grown 4H-SiC crystals (abstract) PRESENTER: Kazuyoshi Tanabe |
09:30 | Excess Carrier-Induced Modulation of SiC Mechanical Properties: Insights from First-Principles Calculations (abstract) PRESENTER: Hiroki Sakakima |
09:35 | Impacts of wafer thinning process using laser slice technique on device characteristics (abstract) PRESENTER: Kyohei Akiyoshi |
09:40 | Body diode reliability and reverse recovery characteristics of short tapered SJ-MOSFET fabricated by MeV Al ion implantation (abstract) PRESENTER: Takeshi Tawara |
09:45-10:15Break (30min)
10:15-11:45 Session 3A: Detectors & Emerging Devices
Chairs:
Location: Auditorium
10:15 | Self-heating in 4H-SiC Avalanche-Photodiodes and its Impact on Spectral Responsivity Measurements (abstract) PRESENTER: Felix Beier |
10:30 | Impact of Device Structure on the Performance of Ion-Implanted SiC Phototransistors (abstract) PRESENTER: Yang Liu |
10:45 | Defects induced by high-temperature neutron irradiation in 250 µm thick 4H-SiC p-n junction detector (abstract) PRESENTER: Enrico Sangregorio |
11:00 | Linking Heavy-Ion Irradiation and Degradation of Silicon Carbide Devices using TCAD (abstract) PRESENTER: Axel Erlebach |
11:15 | Characterization of 4H-SiC lateral MOSFETs up to 773K (abstract) PRESENTER: Nicola Rinaldi |
11:30 | 1.2 kV SiC MOSFET with Reduced Dynamic Losses Enabled by SiN Gate Dielectric (abstract) PRESENTER: Tommaso Stecconi |
10:15-11:45 Session 3B: Quantum Devices
Chairs:
Location: Convention Hall, 1F
10:15 | (Invited) A SiC-based Desktop Quantum Computer (abstract) PRESENTER: Matthias Niethammer |
10:45 | Room-temperature coherent photoelectrical readout of single spins in 4H-SiC (abstract) PRESENTER: Tetsuri Nishikawa |
11:00 | Theory of Electrically Detected Magnetic Resonance of Silicon-Vacancy-Related Defects in Silicon Carbide (abstract) PRESENTER: Michael Flatté |
11:15 | Scalable Fabrication and Electrical Characterization of Lateral pin-Diodes on 4H-SiC a-Plane Wafers for Functionalization of VSi (abstract) PRESENTER: Jannik Schwarberg |
11:30 | Tunable, highest-quality factor mechanical oscillators for quantum technology (abstract) PRESENTER: Andre Hochreiter |
11:45-13:00Lunch (75min)
13:00-14:15 Session 4A: Bulk Growth 1
Chairs:
Location: Auditorium
13:00 | (Invited) Approaches Toward High-Quality and Cost-Effective Bulk Growth of SiC Crystals (abstract) PRESENTER: Won-Jae Lee |
13:30 | Close Space PVT Growth of n- and p-type quasi-bulk SiC in a Classic PVT Setup and a Newly Developed TableTopCS Growth Machine (abstract) PRESENTER: Peter Wellmann |
13:45 | SiC Growth by Multi-Wafer Close-Space Sublimation (abstract) |
14:00 | New insights on nitrogen doping of polycrystalline SiC fabricated by CVD (abstract) PRESENTER: Yann Gallou |
13:00-14:15 Session 4B: Quantum Communication
Chairs:
Location: Convention Hall, 1F
13:00 | (Invited) Atomic defects in silicon carbide – A scalable quantum technology (abstract) |
13:30 | Simulation and Experimental Characterization of Skyfish Cavities in 4H-SiCOI for Future Quantum Networks (abstract) PRESENTER: Gerben Timmer |
13:45 | Entangled Photon Source on the SiCOI Platform (abstract) |
14:00 | Exploring vanadium defects in SiC for quantum communication (abstract) PRESENTER: Philipp Koller |
14:15-14:45Break (30min)
14:45-16:00 Session 5A: Ion Implantation
Chairs:
Location: Auditorium
14:45 | Compact Edge Termination Design for Ultra High-Voltage (>10 kV) 4H-SiC Power Devices using Background Doping Modulation (BDM) (abstract) PRESENTER: Mohamed Torky |
15:00 | Effect of Varying N⁺ Source Implantation Depth on the Electrical Characteristics of 1.2 kV 4H-SiC MOSFETs (abstract) |
15:15 | Development of High Energy Channeling Implantation Process for SiC Superjunction Devices (abstract) PRESENTER: Reza Ghandi |
15:30 | Path for superjunction industrialization by single step high energy channeling implant (abstract) PRESENTER: Fulvio Mazzamuto |
14:45-16:00 Session 5B: Degradation Phenomena
Chairs:
Location: Convention Hall, 1F
14:45 | A Multi-Manufacturer Test Campaign to Assess the Power Cycling Capability of Silicon Carbide MOSFETs in TO-247 Packages (abstract) PRESENTER: Felix Hoffmann |
15:00 | Impact of the Negative Gate Bias on Short-Circuit Robustness of SiC MOSFETs with measurements and simulations (abstract) PRESENTER: Madhu Lakshman Mysore |
15:15 | Impact of current density, accumulated injected charge and temperature on bipolar degradation in 4H-SiC PiN diodes (abstract) PRESENTER: Rijuta Bagchi |
15:30 | Carrier lifetime in 4H-SiC substrates and relationship with device reliability (abstract) PRESENTER: Keisuke Nagaya |
15:45 | Reliability Prediction of SiC MOSFETs via Triple-Sense Vth Measurement and PCA-based Degradation Modeling (abstract) PRESENTER: Yoshiki Takinai |
16:00-16:15Break (15min)
16:15-18:00 Session 6: Posters (MON)
Chairs:
Location: Exhibition Hall 1, 1F
Strain Relief of Silicon Carbide (4H-SiC) Substrates by Wet Etching (abstract) PRESENTER: Norbert Bay |
Ultra-Pure SiC Source material for optical SiC crystal growth (abstract) PRESENTER: Jan Richter |
Influence of interfacial pores between seed/graphite holder interface on thermal field in 4H-SiC crystals grown by physical vapor transport (abstract) PRESENTER: Daisuke Tahara |
Oxygen Pressure-Induced Phase Transition in Ga₂O₃/4H-SiC Heterojunction Diodes: From β to ε (abstract) PRESENTER: Jinwoo Choi |
Graphite – The Hot Zone Hero (abstract) PRESENTER: Melih Badir |
Optimizing Diamond Slurry Parameters for Polishing SiC Wafers (abstract) PRESENTER: Jacob Palmer |
Fabrication of 8-inch High-Purity 4H-SiC Single Crystal Substrates (abstract) PRESENTER: Xianglong Yang |
Polytype Transitions in Silicon Carbide: A Macroscopic View (abstract) PRESENTER: Joerg Pezoldt |
Investigation on the effect of interface supersaturation on the growth rate and the step structures in the solution growth of 4H-SiC Single Crystals (abstract) PRESENTER: Yusaku Sakata |
Photoluminescence studies of defect formation during the seeding process of physical vapor transport growth of SiC (abstract) PRESENTER: Toshitatsu Iwai |
Surface Analysis of SiC Wafers after Sonic Lift-Off: Replacing Backgrinding to Enable SiC Wafer Reuse (abstract) PRESENTER: Pablo Guimera Coll |
High Quality 8-inch 4H-SiC Epitaxial Products (abstract) PRESENTER: Yu Guo |
Development of Wide Bandgap Semiconductor Substrates Using Data and AI Techniques Based on Process Informatics: Solutions for SiC Crystal Growth (abstract) PRESENTER: Seong-Min Jeong |
SiC engineered substrate versatility demonstration versus industry requirement (abstract) PRESENTER: Walter Schwarzenbach |
Evaluation of the apparent electrical conductivity of carbon fiber-based insulations used in the PVT process (abstract) PRESENTER: Yann Gallou |
Ignition point control of high oxidant concentration CMP slurry (abstract) PRESENTER: Yasuaki Kimikado |
Optimization of DIW brush cleaning technology using spin scrubber in SiC device manufacturing process (abstract) PRESENTER: Seiu Katagiri |
Investigation of Micropipe Defects and Their Strain Field Distortions in SiC Substrates Using X-ray Topography (abstract) PRESENTER: Li Sun |
Ultrafast Imaging for Deep Defect Imaging Through Entire SiC Wafers (abstract) PRESENTER: Torben Purz |
Influence of Temperature Field and Doping on BPD Distribution in 8-inch 4H-SiC Substrates (abstract) PRESENTER: Zhenxing Fu |
Classification of scratch-like polishing damage in 4H-SiC wafers using mirror projection electron microscope (abstract) PRESENTER: Hideki Sako |
Evaluation of oxide processing steps using contactless corona-based CV measurements (abstract) PRESENTER: Robin Karhu |
Ultraviolet Luminescence of N-type SiC crystals grown with various sources under different growing conditions via PVT method (abstract) PRESENTER: Jae-Hyeon Park |
Observation and Analysis of the “Galaxy” Defect in 4H-SiC Wafer Through X-Ray Synchrotron Topography (abstract) PRESENTER: Kaixuan Zhang |
Wafer-scale, non-destructive characterization of dislocations in 4H-SiC combining birefringence imaging and laboratory X-ray topography (abstract) PRESENTER: Shunta Harada |
Optical characterization of heavy-ion induced damage in 4H-SiC (abstract) PRESENTER: Helton Goncalves de Medeiros |
Minority charge carrier lifetime for evaluating 4H-SiC epitaxial growth by Microwave detected Photoconductivity Decay (abstract) PRESENTER: Christian Wißgott |
Atomistic simulations of SiC crystal growth phenomena (abstract) PRESENTER: Lorenz Romaner |
VT modulation by dipole effect on 4H-SiC with Atomic Layer Deposited Al₂O₃/SiO₂ dielectrics (abstract) PRESENTER: Bongmook Lee |
Effects of 673K temperature ramps on a 4H-SiC CMOS NOT logic gate (abstract) PRESENTER: Nicola Rinaldi |
Suppression of stacking faults expansion by backside proton implantation into SiC substrates (abstract) PRESENTER: Tong Li |
Enhanced Breakdown Voltage and Enlarged Process Window for Junction Termination Extension in SiC Power Devices Using Hybrid Random and Channeling Implantation (abstract) PRESENTER: Shuiyou Zheng |
Investigation on thermal stability for Silicon-cap-annealed Ohmic Contact on n-type 4H-SiC (abstract) PRESENTER: Takahito Fukuzawa |
Silicon Carbide Wafering (abstract) PRESENTER: Chun-Ming Chen |
Reduction of Sidewall Roughness in SiC Trench Formation by Improvement of Photoresist Mask (abstract) PRESENTER: Alesa Fuchs |
Multi-scale model of ICP-RIE process for improvement of SiC gate trench shape (abstract) PRESENTER: Andrey Smirnov |
Electrical Properties of 4H-SiC MOSFETs on Non-Polar Faces with Various Surface Treatments (abstract) PRESENTER: Woongsun Kim |
Extraction of trench sidewall capacitance by linear component separation towards wafer level evaluation (abstract) PRESENTER: Maximilian Szabo |
Next generation laser annealing for high throughput SiC ohmic contact formation and dopant activation (abstract) PRESENTER: Sebastian Geburt |
Impact of ambient conditions on oxide thickness distribution on 4H-SiC in thermal oxidation furnace (abstract) PRESENTER: Tamara Fidler |
Fabrication of high-performance SiC MOSFETs via 2-step annealing in H₂/Ar gas mixtures: A novel method without interface nitridation (abstract) PRESENTER: Hiroki Fujimoto |
Study on Temperature Coefficient of Vth of 4H-SiC MOSFETs on Si-face (abstract) PRESENTER: Jia-Wei Hu |
Dynamic conduction behavior of SiC-Mosfets in the subthreshold regime and the impact of deep oxide traps to the channel depletion (abstract) PRESENTER: Marvin Gloth |
5 MGy Gamma-ray Radiation Effects on 4H-SiC Embedded Photodiode (abstract) PRESENTER: Kazuma Tanigawa |
Investigation of Electrical Degradation in 1.2 kV SiC MOSFETs with Embedded SBDs under Power Cycling Test (abstract) PRESENTER: Gyuhyeok Kang |
JTE-Based Termination design and technology considerations for 1200 V 4H-SiC Superjunction MOSFETs (abstract) PRESENTER: Zihan Zhang |
Simultaneous p- and n-type doping carrier profiling of 4H-SiC MOSFETs by Scanning Microwave Impedance Microscopy (abstract) PRESENTER: Patrick Fiorenza |
Technology Challenges in Achieving the Quasi-Planar Trench 3.3 kV SiC MOSFETs Performances (abstract) PRESENTER: Luca Maresca |
Investigation of the P-body effect on Reverse Recovery and Static Characteristics of 1.2 kV 4H-SiC Power MOSFET (abstract) PRESENTER: Jeff Joohyung Kim |
The Tunneling Field-Effect Transistor as Novel Device Concept for High-Frequency Hard-Switching Power Electronics (abstract) PRESENTER: Jan Frederik Dick |
Influence of different contact lengths on 4H-SiC TLM test structures (abstract) PRESENTER: Maximilian Ley |
Simulating Short Circuit events on SiC MOSFET devices (abstract) PRESENTER: Alfredo Walter Mario Guerrera |
Impact of Transient Surge Current Pulses on Bipolar Degradation in SiC Power MOSFETs (abstract) PRESENTER: Alexander Brunko |
Investigation of Asymmetric Switching Characteristics of SiC MOSFETs Using Double Pulse Test (abstract) PRESENTER: Yeonju Lee |
New 1200V SiC MOSFET with improved specific-on-resistance and short-circuit capability characteristics (abstract) PRESENTER: Chang-Ju Lee |
10 hours 500°C Heating Test of 4H-SiC MOSFETs with Pt/Ti and Pt/TiN electrodes (abstract) PRESENTER: Ryosuke Namba |
Analysis of Repetitive Surge Current in Commercial SiC Schottky Diodes (abstract) PRESENTER: Jenny Damcevska |
Anodic Oxidation of 4H-Silicon Carbide (abstract) PRESENTER: Roberta Vitale |
Impact of JFET Width on Gate Oxide Reliability under HTRB Conditions in 1700V SiC MOSFETs (abstract) PRESENTER: Min-Jae Park |
RC Snubber Co-Design of SiC Power Modules considering Impact on Transient Switching Characteristics (abstract) PRESENTER: Bong Hak Lee |
Impact of Gamma-Ray Irradiation on the Dynamic Switching Performance of TO-247-3L vs. TO-247-4L 4H-SiC MOSFETs (abstract) PRESENTER: Sangyun Song |
Impact of VDS Bias, Load Current and Temperature on Long-term Switching Operation of 1.2 kV SiC MOSEFTs (abstract) PRESENTER: Sara Kuzmanoska |
Investigating the Mechanisms of the Single Event Effect Lekage Current (SELC) and Single Event Burnout (SEB) in SiC Power Diodes under Heavy-Ion Irradiation (abstract) PRESENTER: Natalija Für |
A low inductance SiC MOSFET power module packaging design with PCB shielding layer (abstract) PRESENTER: Haiyong Wan |
Development of a DBC-Free and Compact Six-in-One SiC Power Module with Enhanced Dual-Side-Cooling Solution (abstract) PRESENTER: Gongyue Tang |
Dynamic switching benchmark of latest gen SiC MOSFETs for Automotive and Urban Air Mobility power modules (abstract) PRESENTER: Reza Soleimanzadeh |
Where light ends, energy begins: Transformation of waste bulbs enclosures into multiphasic silicon carbide for Lithium-ion battery (abstract) PRESENTER: Kyungah Yang |
Diamond Integration on SiC Substrates for Enhanced Heat Dissipation in Power Semiconductor Devices (abstract) PRESENTER: Tae-Yong Park |
Ultra-thick (~200 µm) epitaxy on 150mm 4H-SiC Wafers Using Single Wafer CVD Reactor (abstract) PRESENTER: Nicolas Thierry |
18:00-18:30Break (30min)
Tuesday, September 16th
View this program: with abstractssession overviewtalk overview
08:30-09:15 Session 8: Plenary Lecture 2
Location: Auditorium
08:30 | 4H-SiC as Material for Electricity Infrastructure (abstract) |
09:15-09:45Break (30min)
09:45-11:30 Session 9A: Bulk Growth 2
Chairs:
Location: Auditorium
09:45 | (Invited) 200 mm 4H-SiC Substrate Status and 300 mm 4H-SiC Substrate Development (abstract) PRESENTER: Gao Chao |
10:15 | Quality Improvement in 200mm Silicon Carbide Substrate (abstract) PRESENTER: Rajan Rengarajan |
10:30 | Mechanisms and Modeling of Degradation of Graphite Crucible and Thermal Insulation During PVT Growth of SiC Crystals (abstract) PRESENTER: Andrey Smirnov |
10:45 | Efficient Thermal Field Optimization of Physical Vapor Transport Simulations for Silicon Carbide Single Crystal Growth (abstract) PRESENTER: Lorenz Taucher |
11:00 | Reactive Infiltration SiC Crucibles Unlock Macrodefect Mitigation in 2-Inch SiC Solution Growth (abstract) PRESENTER: Sakiko Kawanishi |
11:15 | Reconstruction of PVT-SiC Growth Setup to Simultaneously Achieve High Material Yield, High Growth Rate, and Large Crystal Height (abstract) PRESENTER: Daisuke Nakamura |
09:45-11:30 Session 9B: FinFETs and Channel Characterization
Chairs:
Location: Convention Hall, 1F
09:45 | (Invited) TCAD-Driven Design and Analysis of Advanced 3D SiC MOSFET Structures (abstract) |
10:15 | Origin of high mobility in 4H-SiC FinFETs through theoretical analysis of electron scattering mechanism (abstract) PRESENTER: Shion Toshimitsu |
10:30 | FinFET Effect of Vertical-channel Fin-SiC MOSFET (abstract) PRESENTER: Tomoka Suematsu |
10:45 | Study of interface traps and scattering mechanisms in 4H-SiC MOS channel using gated Hall measurements (abstract) PRESENTER: Suman Das |
11:00 | Investigation of SiC MOSFETs Gate Capacitance Peak with Biased Drain and its relation with Transconductance (abstract) PRESENTER: Ilaria Matacena |
11:15 | Comparison of Ramp- and ac-based C-V Methods for Characterization of SiC Power MOSFETs (abstract) PRESENTER: Michel Nagel |
11:30-13:00Lunch (90min)
13:00-14:15 Session 10A: Substrate Processing
Chairs:
Location: Auditorium
13:00 | (Invited) Smart Cut™ for Wide Bandgap Semiconductors: Enhancing SiC’s Potential (abstract) PRESENTER: Julie Widiez |
13:30 | Characterization of Al-Gate MOS Capacitor on Thermally-Oxidized 3C/4H Hybrid Polytype-Heterostructure Si-Face SiC(0001) Wafer Fabricated by Simultaneous Lateral Epitaxy (SLE) Method (abstract) PRESENTER: Masao Sakuraba |
13:45 | Key Mechanisms of Laser-Based Splitting and Dicing of 4H-SiC Wafers (abstract) PRESENTER: Hanan Mir |
14:00 | Comparison of Mo, Mo-carbide and Mo-silicide Schottky contacts on 4H-SiC (abstract) PRESENTER: Marilena Vivona |
13:00-14:15 Session 10B: Radiation Effects and Late News
Chairs:
Location: Convention Hall, 1F
13:00 | In-situ measurement of the gain stage of a SiC JFET operational amplifier under gamma ray irradiation (abstract) PRESENTER: Masayuki Yamamoto |
13:15 | Improvement of Single-Event Gate Rupture tolerance by terraced gate 4H-SiC DMOSFET (abstract) PRESENTER: Kana Hiramastu |
13:30 | Investigation on the Resistance Degradation of Trench SiC MOSFETs under Total Ionizing Dose Radiation and High Drain Voltage Bias (abstract) PRESENTER: Zhaoxu Song |
13:45 | Channel Length Effects on Threshold Voltage Instability in Gamma-Irradiated 4H-SiC PMOSFETs (abstract) PRESENTER: Chuan-Han Chen |
14:00 | Isolation of cumulative heavy-ion induced gate degradation effects within a commercial 4H-SiC double trench MOSFET (abstract) PRESENTER: Peter Gammon |
14:15-14:45Break (30min)
14:45-16:15 Session 11A: Extended Defect 1
Chairs:
Location: Auditorium
14:45 | (Invited) The mechanisms of Defect Replication, Propagation, Modification, Nucleation and Multiplication in 4H-SiC PVT-grown Substrates and CVD-grown Homo-epitaxial Layers (abstract) PRESENTER: Michael Dudley |
15:15 | Synchrotron X-ray topography analysis of low angle grain boundaries Induced by Growth Step Flow in PVT-Grown 4H-SiC Crystals (abstract) PRESENTER: Jianpei Zhang |
15:30 | Revisiting the (4,1) Frank-Type Stacking Fault in 4H-SiC: Extrinsic or Intrinsic Stacking Fault? (abstract) PRESENTER: Soon-Ku Hong |
15:45 | Polytype analysis of 3C-SiC/4H-SiC stacked epilayers on trenched 4H-SiC substrates by Raman spectroscopy (abstract) PRESENTER: Masashi Kato |
16:00 | Investigation of Spoke Pattern of Stacking Faults in 4H-SiC Wafers Grown by Physical Vapor Transport Method (abstract) PRESENTER: Zeyu Chen |
14:45-16:15 Session 11B: High-Voltage Devices
Chairs:
Location: Convention Hall, 1F
14:45 | (Invited) Technology Trends of performance improvement in SiC MOSFETs: The Impact of Trench and Super Junction Structure Technology (abstract) PRESENTER: Hiroshi Kono |
15:15 | Effect of Dynamic AGE-ing Process on the Electrical Characteristics of 3.3kV SiC MOSFETs (abstract) PRESENTER: Kumiko Konishi |
15:30 | High-Voltage Performance Evaluation of 6.5 kV 4H-SiC JBSFET Architectures and MOSFET with Enhanced 3rd Quadrant Conduction (abstract) PRESENTER: Shariare Hossain Rabbi |
15:45 | Minimizing edge termination footprint in UHV SiC power devices: an area-efficient edge structure for power devices rated over 10 kV (abstract) PRESENTER: Marco Pocaterra |
16:15-16:30Break (15min)
16:30-18:30 Session 12: Posters (TUE)
Chairs:
Location: Exhibition Hall 1, 1F
Analysis of Axial Resistivity During SiC Crystal Growth by PVT Method (abstract) PRESENTER: Lingling Xuan |
Homoepitaxy and defect control of 300-μm ultra-thick 4H-SiC layers (abstract) PRESENTER: Rong Wang |
Development of high concentration uniformity epitaxial growth on 200 mm 4H-SiC wafers (abstract) PRESENTER: Weining Qian |
Ring Coating Thickness Control for High Quality N type 4H-SiC Epilayers Based on Growth and Doping Kinetic Analysis (abstract) PRESENTER: Jiahui Wang |
Control of SSF Defects in 8-inch SiC Epitaxial Wafers (abstract) PRESENTER: Zehua Wang |
Heteroepitaxial Growth of CVD SiC on Graphene Buffer Layers Formed on SiC wafers (abstract) PRESENTER: Jungmin Lee |
Improved Particle Removal and Sub-Nanometer Roughness Control in 4H-SiC Wafers Using PVA Brush Conditioning (abstract) PRESENTER: Yoon-Ji Ra |
An In-Situ Study of Al Effects on Step Structures under Diffusion Controlled 4H-SiC Solution Growth (abstract) PRESENTER: Ryunosuke Hashimoto |
Effects of Post-Deposition Annealing on Temperature dependent Electrical Characteristics of SnO₂/4H-SiC Schottky Barrier Diodes (abstract) PRESENTER: Chang-Jun Park |
Comprehensive Analysis of Carrier Lifetime and Deep-Level Traps in 4H-SiC: Impact of Epitaxial Growth Temperature and Rate (abstract) PRESENTER: Firas Faisal |
Thick SiC-4H epitaxy perspectives (abstract) PRESENTER: Silvio Preti |
The effect of the Si partial pressure depending on SiC powder stacking configurations on the heat treatment of 4H-SiC wafers (abstract) PRESENTER: Gyeong Jun Song |
Improvement of SiC crystal quality and residual stress by a seed adhesion process employing carbon-based adhesive and buffer-layer (abstract) PRESENTER: Na Kyeoung Kim |
Numerical Simulation of Optimal Source Temperature Distribution in PVT Method for SiC Single Crystals (abstract) PRESENTER: Shota Tani |
SiC Single Wafer Chemical Mechanical Polishing Process Improvements for Throughput and Surface Finish (abstract) PRESENTER: Ruijie Li |
SIMS Profiling of 3D SiC Mesas: Top and Sidewall Analysis (abstract) |
Improvement of gate-source short failure by suppressing abnormal polySi layer in 1200V SiC MOSFETs (abstract) PRESENTER: Haeri Kwon |
Non-Destructive Optical Detection of Dislocation Defects in N-type SiC Substrate Wafers (abstract) PRESENTER: Yuzhong Chen |
Advanced defects study and monitoring in new generation 4H-SiC devices (abstract) PRESENTER: Nicolo Piluso |
Investigation of Mechanical Stress and Warpage in 200mm Silicon Carbide Wafers: Implications for Production Scalability (abstract) PRESENTER: Lin Dong |
Multi-channel defect inspection for 4H-SiC epitaxial wafer and integrated defect classification (abstract) PRESENTER: Masaki Hasegawa |
Non-contact Micro-scale Imaging Analysis of Electrically Active Defects Causing EOL Failures in Merged PiN Schottky Diodes (abstract) PRESENTER: Marshall Wilson |
Formation and reduction of surface pits on 4H-SiC epitaxial layer (abstract) PRESENTER: Weining Qian |
Optical localization of passivation discoloration using admittance spectroscopy (abstract) PRESENTER: Marvin Gloth |
Characterization of 3C-SiC thick epitaxial layers grown on off- and on-axis 4H-SiC substrate (abstract) PRESENTER: Jun Fujita |
Thin transition zone measurement in silicon carbide epi structures by Fourier transform infrared reflectometry and point contact current-voltage technique (abstract) PRESENTER: Eszter Eva Najbauer |
Insight into the Features and Characteristics of Stacking Faults on 129 4H-SiC Epitaxial Wafers Investigated Using Wafer-Scale Photoluminescence Mapping and Spectra Analysis Combined with HAADF HR-STEM (abstract) PRESENTER: Hyundon Jung |
Challenges in 1SSF detection in 4H-SiC epilayer and related failure (abstract) PRESENTER: Cristiano Calabretta |
Impact of ICP-RIE Process-Induced Deep-Level Defects on Carrier Lifetime in 4H-SiC Epitaxial layers (abstract) PRESENTER: Minseok Kim |
Investigating the temperature dependence of charge carrier lifetime in low-doped n-type 4H-SiC (abstract) PRESENTER: Anders Hallén |
Analysis of Overlapping Capacitance Transients in DLTS and MCTS for Commercial SiC Power Diodes (abstract) PRESENTER: Natalija Für |
Chelation-Assisted Cleaning for Effective Removal of Al and Mn Contaminants on 4H-SiC Wafer (abstract) PRESENTER: Yeon-Je Gye |
Evaluation of transmission spectra of vanadium-doped 4H-SiC substrates by optical transmittance measurement (abstract) PRESENTER: Haruhiko Udono |
Characterization of Stress and Defects in 4H Silicon Carbide Wafers by Scanning Infrared Depolarization (abstract) PRESENTER: Markus Stoehr |
Inhomogeneity of recombination lifetime in 4H-SiC epitaxial layers and surface passivation (abstract) PRESENTER: Dávid Krisztián |
Effects of Conditioning Disc Designs on the Tribological, Vibrational, Thermal, Kinetic, Pad Micro-Textural and Pad Wear Characteristics of Silicon Carbide CMP Processes (abstract) PRESENTER: Ara Philipossian |
Effects of Thermal and CVD Gate Oxides on Dielectric Properties and Sidewall Capacitance in SiC Trench MOS Capacitors (abstract) PRESENTER: Hyung-Jin Lee |
Improved Silicide Formation in Vertical 4H-SiC JFET via Double Spacer Process (abstract) PRESENTER: Gihoon Park |
Critical Wafer Processes for SiC Device Fabrication (abstract) PRESENTER: Dave Thomas |
Decoupled Plasma Nitridation of SiC surface for Interface States Density reduction in 4H-SiC MOS Capacitors (abstract) PRESENTER: Patrick Fiorenza |
Impact on SiC/SiO₂ interface by N₂/H₂ high temperature pretreatment and SiO₂ Deposition (abstract) PRESENTER: Heng Wang |
Utilizing SiO₂ Reflow for Corner Rounding to Prevent Cracking in Passivation Layers Above 500 °C (abstract) PRESENTER: Julien Koerfer |
Study on Electrochemical Assisted Fixed-Abrasive Lapping for Wafer Thinning of Monocrystalline Silicon Carbide Wafer (abstract) PRESENTER: Shao-Yuan Huang |
SiO₂/SiC Interface Engineering via Low-temperature NO Oxynitridation of SiC Surface Feasible with Si Device Fabrication Equipment (abstract) |
Effect of Silicon and Oxygen Pre-Implantation on Thermal Oxidation of 4H-SiC (abstract) PRESENTER: Enrico Sangregorio |
Exploring Backside Contact Formation on Bilayer SiC Engineered Substrates Using Nanosecond Laser Anneal (abstract) PRESENTER: Guillaume Gelineau |
Effect of Al₂O₃ and HfO₂ Interfacial Layers on Leakage Current in 4H-SiC MIS Diodes (abstract) PRESENTER: Hyeon-Do Kang |
Improvement in On-Resistance of 1200 V 4H-SiC VDMOSFETs using SmartSiC™ Wafers (abstract) PRESENTER: Servin Rathi |
The effect of different pulse widths on the laser slicing of 8-inch 4H-SiC (abstract) PRESENTER: Haoyu Fan |
UV Laser Annealing Effects on Highly Implanted 4H-SiC Epilayers (abstract) PRESENTER: Kushani Hapuhinna Perera |
Surface engineering of the 4H-SiC SiO₂/SiC interface by combining atomic layer deposition and atomic layer etching (abstract) PRESENTER: Arne Benjamin Renz |
Channeling ion implantation along the <0001> direction in 4H-SiC: difference in the Si- and C-faces (abstract) |
4H-SiC p⁺/n diodes as environment to modify ⁷Be radioactive decay time (abstract) PRESENTER: Marica Canino |
Effect of energy injection on the interfacial structure and mechanical behavior of Si/Al: A molecular dynamics study (abstract) PRESENTER: Ji Hwan Kim |
Optical pump-terahertz probe spectroscopy for measuring 4H-SiC carrier lifetime through complex surface layers (abstract) PRESENTER: Nikolaos Iosifidis |
Dynamic Current-Voltage Behavior of SiC Power MOSFETs (abstract) PRESENTER: Michel Nagel |
A Methodology for Channel Mobility Extraction in SiC Vertical Power MOSFETs (abstract) PRESENTER: Yu-Chieh Chien |
Design of Robust Edge Termination Applied to 4.5kV SiC SBD Embedded MOSFET Against Humidity (abstract) PRESENTER: Daichi Dansako |
A Comparative Analysis of Proton Irradiated 1.2 kV SiC Edge Termination Test Group (abstract) PRESENTER: Sangyeob Kim |
Optimization of a 1200V SiC lateral SiC Schottky diode (abstract) PRESENTER: Zhaoxue Yuan |
Impact of optical phonon scattering on Inversion Layer Mobility in 4H-SiC p-channel lateral MOSFETs (abstract) PRESENTER: Ji-Hyun Kim |
5 MGy Gamma-ray Radiation Effects on 4H-SiC Active Pixel Sensors (abstract) PRESENTER: Tatsuya Meguro |
Fowler-Nordheim current at negative gate bias in SiC MOSFETs (abstract) PRESENTER: Dick Scholten |
Advanced Simulation Methodology of Switching Performance and Reverse Recovery Effects of SiC MOSFET and Influence of Parasitic Components on Simulation Results (abstract) PRESENTER: Dan Zurek |
Experimental analysis of 4H-SiC CMOS NOT logic gate down to 100K (abstract) PRESENTER: Luigi Di Benedetto |
4H-SiC CMOS D-type Flip-Flop Circuits for Logic Circuits in Harsh Environments (abstract) PRESENTER: Taisei Ozaki |
Impact of Edge Termination Structure and Length on Switching Characteristics of SiC MOSFETs (abstract) PRESENTER: Hyunyong Park |
Influence of Cell Structure and Topology on Coss of 4H-SiC MOSFET (abstract) PRESENTER: Ruei-Ci Wu |
TCAD modeling of temperature dependent transfer characteristics of 4H-SiC Lateral MOSFETs (abstract) PRESENTER: Hemant Dixit |
Study of SiC Thyristors with Integrated Temperature Sensors (abstract) PRESENTER: Yuan Lei |
Simulation of highly sensitive 3C-SiC strain sensor (abstract) PRESENTER: Angela Garofalo |
A Novel Structure Design of SiC-based SCR Structure with High Holding Voltage Using Segment Topology for High Voltage ESD Protection (abstract) PRESENTER: Sang Gi Kim |
A Physics-based SiC DSRD SPICE Model for Pulsed Power Circuit Simulation (abstract) PRESENTER: Jingkai Guo |
Ga₂O₃ film with ultrahigh breakdown field via novel aerosol deposition method (abstract) PRESENTER: Jun-Woo Lee |
Electrical identification of color centers in 6H silicon carbide using a comparative study of deep level transient spectroscopy and density functional theory (abstract) PRESENTER: Erlend Ousdal |
Aerosol-Deposited Ga₂O₃–SiC Composite Films for Enhanced Thermal Performance in Power Semiconductor Devices. (abstract) PRESENTER: Hyeong-Seok Oh |
Ag:AZO Electrodes Deposited by Co-sputtering Using FTS to Improve Photodetector Performance (abstract) PRESENTER: Hanbi Jung |
Investigation of phase transition and its impact on the crystal structure and material properties of polycrystalline α/β Ga₂O₃ thin film (abstract) PRESENTER: Jeong-Min Youn |
Low-pressure Mist-CVD technique for Sn-assisted epitaxial growth of high-crystallinity κ/ε-Ga₂O₃ (abstract) PRESENTER: Yan Wang |
Impact of Socket and Current Shunt on Switching Characteristics of GaN HEMTs (abstract) PRESENTER: Yeonwoo Seo |
Application of ALD-derived Hf₀.₂₅Al₀.₇₅O-based as Gate Dielectric in AlGaN/GaN High Electron Mobility Transistor (abstract) PRESENTER: Chun-Yu Lin |
Growth and Properties of SiGe - AlN Core-Shell Crystals (abstract) PRESENTER: Eunmin Kwon |
Si Layer Formation on SiC Substrates by HVPE Sublimation Sandwich Method (abstract) PRESENTER: Donghyeon Jeong |
Optical characterization of doping-induced defects in n-type 4H-SiC (abstract) PRESENTER: Aurora Teien |
Towards High-Efficiency Photonic Interfaces for Colour Centres in Silicon Carbide (abstract) PRESENTER: Nien-Hsuan Lee |
Impact of oxidation temperature on the formation and annihilation of color centers at SiO₂/SiC interfaces (abstract) PRESENTER: Yu Kaneko |
Generation of Divacancy Colour Centres in 4H-Silicon Carbide for Quantum Nanophotonics with Optically Active Spins (abstract) PRESENTER: Leonard K.S. Zimmermann |
The Impact of Pre-Growth Treatment of Si- and C-face 4H-SiC Substrates on the Heteroepitaxial Growth of β-Ga₂O₃ by Plasma-Assisted Molecular-Beam Epitaxy (abstract) PRESENTER: Raouf Hayyak |
Coherent Control and Narrow-Linewidth Spectroscopy of a Four-Level Silicon Vacancy Spin in Silicon Carbide (abstract) PRESENTER: Seung-Jae Hwang |
Experimental Investigation of Single-Event Effect Mechanisms in 1200V SiC VDMOSFETs Under Heavy-Ion Irradiation (abstract) PRESENTER: Zhiwen Zhang |
Experimental study of Single-Event Irradiation Hardness of 4H-SiC Power MOSFET with Trench Well and Corner P-Pillar (abstract) PRESENTER: Keyu Liu |
Reducing Parasitic Inductance Through Power Terminal Grouping in SiC Power Modules for EV Applications (abstract) PRESENTER: Jaejin Jeon |
Fast Speed SiC IPM Module with Zero Voltage Gate Driving Utilizing Active Miller Clamp Function on Drive IC (abstract) PRESENTER: Samuell Shin |
Novel 1.2kV SiC MOSFET with New Top-side Cooling Package for Automotive Applications (abstract) |
Development and Evaluation of a 1.2kV SiC MOSFET-Based PTC Controller for Energy-Efficient xEV Heating Applications (abstract) PRESENTER: Jang-Kwon Lim |
High-Density Packaging Approaches for SiC Power MOSFET Modules (abstract) PRESENTER: Saeed Jahdi |
Comparative Numerical Analysis of Cu Clip and Al Wire Bonding Structures in SiC Schottky Barrier Diodes (abstract) PRESENTER: Na-Yeon Choi |
Highest efficiency and best performance for inverter motor drives in smallest form factor with new SiC MOSFET-based IPM (abstract) PRESENTER: Sangmin Park |
Wednesday, September 17th
View this program: with abstractssession overviewtalk overview
08:30-09:15 Session 13: Plenary Lecture 3
Location: Auditorium
08:30 | It Takes a Village: Shaping the Next Era in SiC Technology (abstract) |
09:15-09:45Break (30min)
09:45-11:30 Session 14A: Defect Interactions
Chairs:
Location: Auditorium
09:45 | (Invited) Point defect engineering in SiC to realize highly reliable power devices (abstract) PRESENTER: Masashi Kato |
10:15 | Investigation on Bipolar Degradation caused by In-grown Stacking Fault in 3.3 kV SiC-MOSFET (abstract) PRESENTER: Hiroki Niwa |
10:30 | Impact of threading dislocations on carrier lifetimes in 4H-SiC epilayers (abstract) PRESENTER: Koichi Murata |
10:45 | Exploring the Ion Implantation Mechanism for Suppressing Stacking Fault Expansion in 4H-SiC: A Fundamental Approach (abstract) PRESENTER: Takashi Yoda |
11:00 | Characterization of Deep Levels Introduced by Energy Filtered Ion Implantation with DLTS and MCTS in 4H-SiC (abstract) PRESENTER: Hitesh Jayaprakash |
11:15 | Investigation of Photoluminescence Emission and Characteristic Wavelength of Various Large-Height Shockley-Type Stacking Faults in 4H-SiC Epitaxial Layers (abstract) PRESENTER: Moonkyong Na |
09:45-11:30 Session 14B: Super-Junction MOSFETs
Chairs:
Location: Convention Hall, 1F
09:45 | (Invited) Comprehensive Study on Theoretical Performance Limit of 4H-SiC Full- and Semi-Superjunction Structures (abstract) PRESENTER: Seigo Mori |
10:15 | Breaking the performance limits in 4H-SiC semi-superjunction devices through asymmetric pillar engineering (abstract) PRESENTER: Daisuke Iizasa |
10:30 | Impact of Void Formation on Semi-Superjunction SiC Schottky Rectifiers for Trench-Filling-Based Fabrication Process (abstract) PRESENTER: Bailing Zhou |
10:45 | Body diode performance of the 4H-SiC 3.3 kV Semi-SJ MOSFET (abstract) PRESENTER: Kyrylo Melnyk |
11:00 | Anomalous Reverse Recovery of Body Diode in 4H-SiC Superjunction DMOSFET (abstract) PRESENTER: Giorgian Borca-Tasciuc |
11:15 | Insight into Bias-Temperature Instability of SiC MOSFETs using Charge Pumping and Triple-Sense Threshold Measurements (abstract) PRESENTER: Shane Stein |
11:30-13:00Lunch (90min)
13:00-14:15 Session 15A: Color Centers for Quantum Applications
Chairs:
Location: Auditorium
13:00 | Solid state defect emitters with no electrical activity in 4H-SiC (abstract) PRESENTER: Adam Gali |
13:15 | Parametrization of Emitter Photoluminescence and Color Center Quantification with Neural Networks (abstract) PRESENTER: Christian Gobert |
13:30 | Interface NIR SPS: Newly observed single photon sources in SiC (abstract) PRESENTER: Mitsuaki Kaneko |
13:45 | Theoretical study of group III–VII impurity-vacancy centers in 4H-SiC as a potential qubit (abstract) PRESENTER: Sosuke Iwamoto |
14:00 | Advancing Scalable Quantum Control with V2 center in SiC: From Electrical integration to Nuclear Spin Coherent control (abstract) PRESENTER: Vadim Vorobyov |
13:00-14:15 Session 15B: Applications and Packaging
Chairs:
Location: Convention Hall, 1F
13:00 | (Invited) Lifetime Assurance of Electric Vehicle SiC Power Modules through Thermal Model-Based Heat Management Strategy (abstract) PRESENTER: Jehwan Lee |
13:30 | Reliability Challenges of SiC MOSFETs Under Continuous Dual-Bias Stress in EV Security Systems: A Lifetime Prediction Study (abstract) PRESENTER: Jihong Zhu |
13:45 | Reliability Analysis and Test Results of SiC Baseless Power Module in bidirectional EV-Charging application (abstract) PRESENTER: Stefano Carboni |
14:00 | Room temperature bonding of SiC chip and Cu heat sink substrate (abstract) PRESENTER: Ryohei Yamauchi |
14:15-14:45Break (30min)
14:45-16:15 Session 16A: Extended Defect 2
Chairs:
Location: Auditorium
14:45 | (Invited) Evolution of Extended Defects in Ultra-Thick SiC Epitaxial Layers (abstract) PRESENTER: Nadeemullah Mahadik |
15:15 | Adverse effects of proton implantation in 4H-SiC epilayers on stacking fault expansion (abstract) PRESENTER: Kazumi Takano |
15:30 | Application of UV photoluminescence spectrum mapping for stacking faults that were expanded from the in-grown stacking fault on a thick 4H-SiC epilayer (abstract) PRESENTER: Kazumi Takano |
15:45 | Structural Transformation Within Bar-Shaped Stacking Faults in 4H-SiC Epitaxial Layer and Substrate (abstract) PRESENTER: Moonkyong Na |
16:00 | Giant Etch Pit Formation and Origin Formed at the Typical Triangular Stacking Fault Area on 4H-SiC Epitaxial Layer Surface by KOH Etching (abstract) PRESENTER: Soon-Ku Hong |
14:45-16:15 Session 16B: Advanced Processing
Chairs:
Location: Convention Hall, 1F
14:45 | (Invited) Advances in Laser Annealing for Ohmic Contact Formation in Thin 4H-SiC Power Devices (abstract) PRESENTER: Simone Rascunà |
15:15 | Carbon Vacancy Engineering on High-Temperature Annealing as a Cost-Effective Approach for Reverse Recovery Suppression in SiC-MOSFETs (abstract) PRESENTER: Minori Matsuoka |
15:30 | Reliable and Manufacturable 1200V SiC Planar MOSFET with Leading-Performance Ron,sp 1.95mΩ·cm² (abstract) PRESENTER: Iram Siddiqui |
15:45 | Impact of Nitric Oxide Annealing on Interface Degradation in SiC MOS Devices under Positive Bias Temperature Stress (abstract) PRESENTER: Yu-Chieh Chien |
16:00 | Critical role of post-deposition annealing on the improvements in SiC MOS structures formed by 2-step H₂/Ar annealing process (abstract) PRESENTER: Keiji Hachiken |
16:15-16:30Break (15min)
16:30-18:30 Session 17: Posters (WED)
Chairs:
Location: Exhibition Hall 1, 1F
Numerical Modeling of Impurities and Defects in 4H-SiC (abstract) PRESENTER: Xuefeng Han |
Epitaxial Growth and Characterization of 4H-SiC layer on C-face and Si-face substrates (abstract) PRESENTER: Chiara Nania |
SmartSiC™ engineered substrate: a robust solution to SiC power devices bipolar degradation (abstract) PRESENTER: Eric Guiot |
Growth of 8 inches SiC single crystal with low BPDs defect (abstract) PRESENTER: Fusheng Zhang |
Growth Simulation and Composition Control of SiC Crystal (abstract) PRESENTER: Zhenzhou Yuan |
Application of a fine grain 3C-SiC powder source material during PVT growth of 4H-SiC crystals (abstract) PRESENTER: Peter Wellmann |
SiC crystal growth simulations using the minimal atomic energy deposition method (abstract) PRESENTER: Alexander Reichmann |
growth and characterization of “IsoPure” epitaxial layers for quantum applications (abstract) PRESENTER: Birgit Kallinger |
Two-Step Electrochemical Mechanical Polishing of Silicon Carbide : Decoupled Anodic Oxidation and CMP for Enhanced Removal Efficiency (abstract) PRESENTER: Doyeon Kim |
Tailored Interfaces on 4H-SiC via CVD Graphene Growth and Molybdenum Silicide Engineering (abstract) PRESENTER: Giuseppe Darrigo |
Optimization of SiC:V deposition on on-axis SiC substrates for semi-insulating templates for graphene growth. (abstract) PRESENTER: Marcin Zielinski |
Multiscale Modeling of SiC Vapor Phase Transport Growth on Off-Axis 4H-SiC: Influence of Thermal Conditions and Step Dynamics (abstract) PRESENTER: Dilip Gersappe |
Effect of Crucible and Thermal Insulation Porosity on Growth Rate and Nitrogen Incorporation in PVT SiC (abstract) PRESENTER: Andrey Smirnov |
Optimization of seed crystal stability at the initial growth stage depending on heating ramp rates and gas flow channels of SiC source powder for growth of 8-inch n-type 4H-SiC single crystal (abstract) PRESENTER: Seung-Jun Lee |
Modeling SiC crystal growth and crucible etching in the PVT furnace (abstract) PRESENTER: Zaher Ramadan |
The influence of the diameter of the inner guide tube and heating ramp rates on seed crystal at the initial growth of 8-inch n-type 4H-SiC single crystals using PVT growth (abstract) PRESENTER: Su Ho Kim |
Prediction of wafer warpage in 200mm 4H-SiC substrates during subsequent processing by residual stress measurement (abstract) PRESENTER: Paul Wimmer |
Effects of Rotational Stacking Faults in Electronic Structure of 4H-SiC Monolayer under Electric Field Stress: A DFT-Based Molecular Dynamics Study (abstract) PRESENTER: John Angelo Capile |
Effect of DLTS parameter on the characterization of deep level defects in 4H-SiC Schottky Barrier Diode (abstract) PRESENTER: Lan Luo |
Micropipes in SiC die Observed by Molten KOH Etching (abstract) PRESENTER: Fabiana Vento |
SiC bulk inspection: digital defect traceability from puck to epi-ready wafers (abstract) PRESENTER: Frédéric Falise |
Photoluminescence study on micropipes in SiC substrates for improving comprehensive full-wafer defect detection accuracy (abstract) PRESENTER: Hirofumi Hoshida |
Correlation Study of Physical and Optical Total Thickness Variation in 4H-SiC Substrates (abstract) PRESENTER: David Lynch |
Application of spectroscopic ellipsometry in silicon carbide technology (abstract) PRESENTER: Zuzana Gelnarova |
4H-SiC Power MOSFET Performance Prediction and Defect Monitoring with Mercury Probe Capacitance-Voltage (MCV)/Current-Voltage (MIV) and Model Based Infrared Reflectometry (MBIR) (abstract) PRESENTER: Benjamin Vigh |
A Comprehensive Study of Buffer Layer Thickness and Doping Effects on SiC Defect Density (abstract) PRESENTER: Firas Faisal |
EBSD (Electron Backscatter Diffraction) as a non-destructive method of analysing sub-surface damage of plasma treated CMP SiC surfaces (abstract) PRESENTER: Zareena Hassanbee |
Depth profiling of boron-related minority traps in n-type 4H-SiC by junction DLTS measurements (abstract) PRESENTER: Orazio Samperi |
Impact of Stacking Fault-Induced Carrier Lifetime Reduction on Static and Dynamic Characteristics of 4H-SiC IGBTs (abstract) PRESENTER: Geon-Hee Lee |
Non-destructive identification of pure threading screw and mixed dislocations in SiC epitaxial wafers: Their impact on surface pit formation (abstract) PRESENTER: Juhyeong Sun |
Strain Evolution and Formation of Interfacial Dislocations in Ion-Implanted 4H-SiC Epilayers during Activation Annealing (abstract) PRESENTER: Xuan Zhang |
Dislocation Types Identification in 4H-SiC by Synchrotron Rocking Curve X-Ray Diffraction Imaging (RC-XRDI): A Signature-Based Approach (abstract) PRESENTER: Arash Estiri |
Growth and Characterization of High-Quality Thick Epitaxial 4H-SiC Wafers for High Voltage Devices (abstract) PRESENTER: Yuzhuo Li |
Silicon Carbide Epitaxial Defect and Substrate Defects Analysis by Dynamic Photoluminescence and X-ray Topography (abstract) PRESENTER: Dong Lee |
Demonstration of ALD SiO₂ as gate oxide in the 1.7kV SiC UMOSFET for high-power and embedded CMOS circuit integration (abstract) PRESENTER: Chia-Lung Hung |
Impact of Re-oxidation on Bias-induced Threshold Voltage Instability of SiC Power MOSFETs (abstract) PRESENTER: Woosung Park |
Impact of ALD Oxidants and Deposition Temperature on Electrical Characteristics of Al₂O₃/SiO₂/SiC MOS-Capacitors (abstract) PRESENTER: Harsha Vardhan Manchineni |
Analysis of backside metal contact resistance on low-resistivity polycrystalline in 4H-SiC bonded substrates (abstract) PRESENTER: Motoki Kobayashi |
Electrical Performance of 4H-SiC MOSFETs with Different Gate Oxide Processes (abstract) PRESENTER: Weichen Yu |
Effects of Annealing Temperature dependent Electrical Characteristics of AlN/SiC Diodes (abstract) PRESENTER: Ye-Jin Kim |
Development of advanced Ni/4H-SiC contact modules by using laser annealing (abstract) PRESENTER: Louis Thuries |
Damage-free Dicing of SiC Substrate Using High-Pressure SF6 Plasma – Time Dependence of Processed Groove Profile – (abstract) PRESENTER: Yuken Matsumura |
Surface Morphologies and Microstructure of Ni and Ni/Nb ohmic contacts on 4H-SiC (abstract) PRESENTER: Anh Dung Nguyen |
Wide temperature range analysis of ITO/4H-SiC Schottky diodes with applications in UV photodetection (abstract) PRESENTER: Razvan Pascu |
Reduction of Edge Chipping in SiC Wafers Using Contour Edge Grinding (abstract) PRESENTER: Yunho Shin |
Effects of the number of processing passes on laser slicing of SiC (abstract) PRESENTER: Jianfei Zhang |
Fabrication and evaluation of 6 inch SiC-based CMOS inverter in South Korea (abstract) PRESENTER: Seongjun Kim |
BPD-Free Dicing of Epitaxial SiC Wafers Using Water Jet Guided Laser (abstract) PRESENTER: Shunya Hirano |
Low-Defect Ni/Ti Composite Backside Ohmic Contact for thinned 4H-SiC Devices Formed by 355 nm UV Laser Annealing (abstract) |
Dopant activation and compensation in p-type 4H-SiC formed by Al⁺ implantation into V-doped semi-insulating substrates (abstract) PRESENTER: Hiroya Adachi |
On the process optimization of ALD-deposition of SiO₂ for SiC MOS processes (abstract) PRESENTER: Arne Benjamin Renz |
NiSi alloy/4H-SiC reaction and silicide formation under excimer laser annealing for ohmic contact (abstract) PRESENTER: Paolo Badalà |
First Investigation of N-i-P diodes implemented on SiC P⁺ Substrates (abstract) PRESENTER: Peter Gammon |
Molecular Dynamics Investigation of Radiation-Induced Damage and Mechanical Behavior in Amorphous Si₃N₄ (abstract) PRESENTER: Ikhwan Shin |
Benchmark Study of State-of-The-Art Commercial 1200V SiC MOSFETs for Automotive Applications (abstract) PRESENTER: Kailun Zhong |
Characterization of SiO₂/4H-SiC systems using time-of-flight elastic recoil detection analysis (abstract) PRESENTER: Mustafa A. Yildirim |
Demonstration of Hybrid-Bonded, Single-Chip 3.3kV 4H-SiC Bidirectional Conventional DMOSFETs at Cryogenic Temperatures (abstract) PRESENTER: Giorgian Borca-Tasciuc |
THE EFFECT OF CHARGE CONTAMINATION ON THE BV ROBUSTNESS OF SIC POWER DEVICES. (abstract) PRESENTER: Salvatore Cosentino |
Impact of Active Cell Geometry on the Static Performance of 10kV 4H-SiC JBS (Junction Barrier Schottky) Diodes (abstract) PRESENTER: Hojung Lee |
Development of device failure prediction method using multi-modal analysis technique (abstract) PRESENTER: Junji Senzaki |
High temperature operating characteristics of 4H-SiC Active Pixel Sensors (abstract) PRESENTER: Yusuke Hata |
Electrical Characterization and Modeling of IC Gen. 12 4H-SiC JFETs (abstract) |
Comparative Study of 1.2kV 4H-SiC Bi-Directional MOSFET (BiD-MOS) Design Approaches: 2-Chip vs Monolithic Integration (abstract) PRESENTER: Stephen Mancini |
Design and Optimization of SiC-based CMOS FinFET for Logic Circuits in High-Temperature Applications (abstract) PRESENTER: Tae Seong Kwon |
Gate leakage imaging of silicon carbide power MOSFETs under negative-bias gate stress (abstract) PRESENTER: Jang-Kwon Lim |
Designing and Simulations of 4H-SiC Neutron Sensors for Boron Neutron Capture Therapy (abstract) PRESENTER: Vu Thi Ha |
Impact of SiC MOSFET Topologies and Gate Runner Design on On-Resistance and Switching Performance (abstract) PRESENTER: Minseok Kang |
An Ultralow Forward Voltage SiC Lateral Pinched Barrier Rectifier (LPBR) (abstract) PRESENTER: Fu-Jen Hsu |
Fabrication of a 1200V SiC Trench MOSFET with an Inverted T-shaped Deep P Junction Based on an 8-inch Platform (abstract) PRESENTER: Lei Zhu |
Enhancing the Short-Circuit Capability of Embedded-SBD 4H-SiC MOSFETs through Ni Silicide Formation (abstract) PRESENTER: Junseong Kim |
Properties of SiC Nanostructures Grown by Mixed-Source Hydride Vapor-Phase Epitaxy Method (abstract) PRESENTER: Myungjun Kim |
Growth of 2H–Si microneedle by Plateau-Rayleigh Instability (PRI) Using Al Nanowires (abstract) PRESENTER: Sohee Kim |
Optimization of Source-connected Field Plate in AlGaN/GaN HEMTs towards high-power and high-frequency Operations: A Simulation Study (abstract) PRESENTER: Tae-Sung Kim |
A Simulation Study of Electronic Device Designs for the Control of Silicon Vacancies in 4H-SiC as Spin Qubits (abstract) PRESENTER: Fabian Jürgen Magerl |
Towards realization of hybrid spin networks in solid-state system (abstract) |
Ohmic p-GaN Gate HEMTs with Al₂O₃/SiO₂ T-gate Dual Insulator Layers (abstract) PRESENTER: Gokhan Atmaca |
Towards a Fully Integrated 4H-SiC a-Plane Quantum-Chip – Transistors and Light Emitters (abstract) PRESENTER: Jannik Schwarberg |
Fabrication of ultrathin freestanding 4H-SiC layers by doping-dependent monolithic electrochemical etching (abstract) PRESENTER: André Hochreiter |
Investigation on Surface Step Arrays and Epitaxial Growth of β-Ga₂O₃ on Miscut (0001) Sapphire Substrates Prepared by Molecular-Beam Epitaxy (abstract) PRESENTER: Raouf Hayyak |
Atomic-Scale Analysis of Twin Defects in β-Ga₂O₃ Single Crystals Grown by the EFG Method (abstract) PRESENTER: Mee-Hi Choi |
Diamond Growth on 4H-SiC Substrates: Influence of Surface Roughening and Polarity (abstract) PRESENTER: Ki-Yeol Woo |
Heteroepitaxial Diamond Growth on ALD-Al₂O₃/4H-SiC via MPCVD (abstract) PRESENTER: Tae-Yong Park |
Novel Strategy for Deterministic Implantation by Ultra-Thin Silicon Carbide Membrane Detector (abstract) PRESENTER: Enrico Sangregorio |
A Comparative Investigation of NiO/Ga₂O₃ PN Diodes: Effects of Rapid Thermal Annealing on Electrical and Defect Behavior (abstract) PRESENTER: Seung-Hyun Park |
Influence of doping on heavy-ion induced color centers in 4H-SiC (abstract) PRESENTER: Helton Goncalves de Medeiros |
Characterization of color centers at SiO₂/SiC interfaces: Energy level identification and discussion of their origins (abstract) PRESENTER: Kentaro Onishi |
Transient junction temperature measurement error of SiC MOSFETs in power cycling – Influence of cryogenic temperatures (abstract) PRESENTER: Lukas R. Farnbacher |
Understanding the Influence of the Different Parameters on the Dynamic VSD Behaviour in SiC MOSFETs during Power Cycling Test (abstract) PRESENTER: Madhu Lakshman Mysore |
Resonance Damping in 1200V Power Modules Using Planar SiC MOSFET Devices for 200 kW Output (abstract) PRESENTER: Peter Shih Hsin Ying |
Comparison of Static and Dynamic Characteristics of SiC MOSFETs with Respect to TO-247 and Hermetic Package Types (abstract) PRESENTER: Yeonju Lee |
Dynamic HV-H³TRB Test on 3.3 kV SiC MOSFET Modules (abstract) PRESENTER: Jan-Hendrik Peters |
Power Cycle Failure Modes of 10 kV SiC-MOSFET Power Modules with Different Wire Bond Layouts (abstract) PRESENTER: Masaki Takahashi |
Degradation Mechanisms of 1200 V 4H-SiC Planar Power MOSFET under Negative HTGB Stress (abstract) PRESENTER: Tsai-Pei Lu |
Accelerated Bipolar Degradation Robustness (aBDR) Evaluation in SiC MOSFETs (abstract) PRESENTER: Davood Momeni |
Discrepancy of Datasheet Measurements in SiC MOSFETs in Bare Dies and TO-247 Packaged Discrete Devices (abstract) PRESENTER: Saeed Jahdi |
Thursday, September 18th
View this program: with abstractssession overviewtalk overview
08:30-09:15 Session 18: Plenary Lecture 4
Location: Auditorium
08:30 | Exploring the Versatility of SiC: Emerging Applications beyond Power Electronics (abstract) |
09:15-09:45Break (30min)
09:45-11:30 Session 19A: Epitaxial Growth 1
Chairs:
Location: Auditorium
09:45 | (Invited) A Toolbox For Trench Filling Epitaxy for SiC Superjunctions (abstract) PRESENTER: Vishal Ajit Shah |
10:15 | Influence of HCl on doping uniformity of 4H-SiC SJ structure (abstract) PRESENTER: Shiyang Ji |
10:30 | Buffer Layer Structural Engineering for Surface Pit Suppression in 4H-SiC Epitaxy (abstract) PRESENTER: Shuangyuan Pan |
10:45 | Improving 3C-SiC Quality Through Wafer Bonded Switchback Epitaxy (abstract) PRESENTER: Gerard Colston |
11:00 | Enabling SiC Photonic Platforms with Smart Cut™: Material Quality and Process Optimization of SiCOI Substrates (abstract) PRESENTER: Stéphanie Huet |
11:15 | Low defectivity epilayers grown on SmartSiC™ engineered substrates (abstract) PRESENTER: Marcin Zielinski |
09:45-11:30 Session 19B: Impact of Point Defects
Chairs:
Location: Convention Hall, 1F
09:45 | (Invited) The Role of Point Defects in Performance and Reliability: From Material and Device to Application (abstract) |
10:15 | Detection of energetically close deep levels in electron-irradiated 4H-SiC by capacitance transient analysis based on Bayesian inference (abstract) PRESENTER: Kotaro Yamanaka |
10:30 | Time-resolved Electron Beam Induced Current (TR-EBIC): A high potential method to map minority charge carrier lifetime in SiC (abstract) PRESENTER: Christian Stefan Gruber |
10:45 | Towards a complete mapping of electron and hole traps in the entire 4H-SiC band gap (abstract) PRESENTER: Rishi Kupper |
11:00 | Defect formation by irradiation with thermal and fast neutrons in SiC (abstract) PRESENTER: Manuel Belanche Guadas |
11:15 | Evaluation of Auger recombination coefficient in highly N-doped 4H-SiC under high-level injection conditions (abstract) PRESENTER: Endong Zhang |
11:30-13:00Lunch (90min)
13:00-14:45 Session 20A: Fundamental Material Properties
Chairs:
Location: Auditorium
13:00 | DC and RF local electrical properties of macrostepped 4H-SiC surface probed by AFM-SSRM and AFM-sMIM modes (abstract) PRESENTER: Rosine Coq Germanicus |
13:15 | Study on the Particle Removal Mechanism on 4H-SiC Surface by Comparison with Si Surface (abstract) PRESENTER: Yoon-Ji Ra |
13:30 | Exploiting the kinetic selectivity of charge pumping in electrically detected magnetic resonance of 4H-SiC MOSFETs (abstract) PRESENTER: Ilias Vandevenne |
13:45 | Enhanced detection of implanted noble gases and hydrogen in silicon carbide by surface and vacuum engineering in SIMS (abstract) |
14:00 | Characterization of the electric field in silicon carbide detectors by Optical Beam Induced Current (abstract) PRESENTER: Saverio De Luca |
14:15 | Temperature dependence of high-field electron and hole drift velocities in 4H-SiC (abstract) PRESENTER: Daichi Fujioka |
14:30 | Generation of Stacking Faults in SiC Epitaxial Layers from BPDs Not Parallel to Step-flow Direction (abstract) PRESENTER: Alecsander Imhof |
13:00-14:45 Session 20B: Device Concepts and Characterization
Chairs:
Location: Convention Hall, 1F
13:00 | (Invited) SiC JFETs: Pushing Performance Boundaries or Re-inventing the Wheel? (abstract) |
13:30 | Modeling of forward current conduction in 4H-SiC PiN diodes (abstract) PRESENTER: Satoshi Asada |
13:45 | Self-Heating Calibration in SiC Power Diodes (abstract) PRESENTER: Kévin Hollmann |
14:00 | ELECTRO-MECHANICAL STRESS RELIEF MODELING OF DIFFERENT PASSIVATION STACK SCHEMES FOR IMPROVED ROBUSTNESS OF SIC POWER DEVICES. (abstract) PRESENTER: Salvatore Cosentino |
14:15 | SiC Power MOSFET Design for Mitigation of Oscillations in Multi-Chip Power Modules (abstract) PRESENTER: Anja Katerina Brandl |
14:30 | Design optimization of 600V 4H-SiC Lateral Bi-directional MOSFET (L-BiD-MOSFET) with 3D TCAD simulation (abstract) PRESENTER: Seung Yup Jang |
14:45-15:00Break (15min)
15:00-17:00 Session 21: Posters (THU)
Chairs:
Location: Exhibition Hall 1, 1F
Growth and analysis of low resistivity polycrystalline silicon carbide using physical vapor transport (abstract) PRESENTER: Anqi Wang |
Carbide coated graphite with enhanced mechanical and chemical properties for SiC crystal growth (abstract) PRESENTER: Charles Dr. Wijayawardhana |
Successful Development of 12 inch SiC crystal by PVT method (abstract) PRESENTER: Rusheng Wei |
Influence of the oval-shaped dark facet on minority carrier lifetime in 4H-SiC homoepitaxial layers (abstract) PRESENTER: Qun Tan |
8-12 Inch Silicon Carbide Wafer Used for AR Glasses (abstract) PRESENTER: Guangming Wang |
Behaviors of basal plane dislocations in 4H-SiC epilayer grown on the facet trace region of substrate (abstract) PRESENTER: Wataru Tochizaki |
In-situ Interferometric Observation of Spiral Growth on 4H-SiC Growth and Attempt of Growth Kinetic and Step Property Analyses (abstract) PRESENTER: Kosei Fukasaku |
Interferometric Observation and Growth Kinetics Analysis of SiC Solution Growth Using a Gibbs-Thomson Solvent (abstract) PRESENTER: Aoto Tanaka |
Distribution of the electrical resistivity of a n-type 4H-SiC crystal (abstract) PRESENTER: Xinyu Xie |
CMOS-Compatible Pore Nucleation on 4H-SiC Si-Face via Reactive Ion Etching for Homogeneous Electrochemical Etching (abstract) PRESENTER: Georg Pfusterschmied |
Optimizing SiC Epitaxy: Innovative approaches for buffer layer growth (abstract) PRESENTER: Cristian Messina |
Solution Growth Technique of Silicon Carbide with In Situ Observation (abstract) PRESENTER: Yoshihisa Abe |
Effect of Various mm-sized Source Granules on SiC Single Crystal Growth via the PVT Method (abstract) PRESENTER: Ha-Jun Kim |
6“ P-type and Ultra-Low Resistivity SiC Crystals Grown by PVT (abstract) PRESENTER: Douglas Dukes |
A Study on the Synthesis and Evaluation of Si/SiC Powders for SiC Wafers Fabrication and Si-based Devices (abstract) PRESENTER: Myung-Beom Park |
Quantitative Simulation of Bipolar Degradation in 4H-SiC Using UV Pulsed Laser: Considerations on the Critical Duration of Threshold Minority Carrier Density (abstract) PRESENTER: Yasuyuki Igarashi |
Depth-Dependent Suppression of Bipolar Degradation in 4H-SiC Diodes via Proton Implantation and Evaluation of Safe Operating Current Density Range (abstract) PRESENTER: Atsushi Shimbori |
Metrology and Visualization of Silicon Carbide Surfaces via Interferometric 3D Optical Profilometry and Scanning Spreading Resistance Microscopy (abstract) PRESENTER: Wooseop Lee |
Suppression of Bipolar Degradation in SiC PiN Diodes Using Substrates Fabricated by Novel Crystal Growth Method Based on Batch Processing (abstract) PRESENTER: Haruko Inayoshi |
Lifetime mapping and decay curve analysis around defects on 4H-SiC epitaxial wafer using µ-PCD measurement (abstract) PRESENTER: Takumi Wakabayashi |
Process-dependent photoluminescence behavior evolution of stacking faults in 4H-SiC (abstract) PRESENTER: Nadja Kölbel |
Comparison of the irradiation temperature effect of on the carrier removal rates in GaN and SiC. (abstract) PRESENTER: Aleksandr Lebedev |
The Evolution of Threading Screw Dislocations Defects in SiC crystals Grown by Physical Vapor Transport (abstract) PRESENTER: Yan Zhang |
Observation of Depletion Layer in SiC Diodes Using a Simple EBIC Holder (abstract) PRESENTER: Shunsuke Asahina |
Impact of Predefined Defects on Device Reliability (abstract) PRESENTER: Giuseppe Darrigo |
High Quality P-type 4H-SiC Growth by PVT Method (abstract) PRESENTER: Shanshan Hu |
Deep-Level Defect Effects on the performance of 4H-SiC Superjunction MOSFETs (abstract) PRESENTER: Se-Rim Park |
The elusive Bulk Inclusion, sizing, wafer- and ingot-level localization and their effect on dislocation generation and epitaxial defectivity in 4H-SiC (abstract) PRESENTER: Jimmy Thörnberg |
Automatic identification of the Burgers vector and line vector of dislocations in 4H-SiC wafer with birefringence simulation (abstract) PRESENTER: Kousei Takahashi |
Rapid Wafer-Scale Evaluation of Defects in SiC Using Deep Learning (abstract) PRESENTER: James Gallagher |
Separating Residual Subsurface Damage and Bulk Crystal Quality in SiC Wafers by Laser Light Scattered Intensity Mapping (abstract) PRESENTER: Tadaaki Kaneko |
Evaluating Bulk and Processing Quality in SiC Wafers via Laser Light Scattering Mapping (abstract) PRESENTER: Mariko Takahara |
An Ab Initio Approach for Insight into the Shockley- and Frank-Type Stacking Faults in 4H-SiC (abstract) PRESENTER: Taswar Iqbal |
Structural Investigation of Carrot Defect with Two Surface Grooves and 3C-SiC Polymorph in 4H-SiC Epitaxial Layer (abstract) PRESENTER: Moonkyong Na |
Feasibility Study of SiC Wafer Reutilization Process through Laser Splitting and Bonding Techniques (abstract) PRESENTER: Takanori Tanaka |
Method to get different silicon carbide trenches profile using plasma etching for high performance SiC MOSFET (abstract) PRESENTER: Jinghe Yang |
Examination of Channeling Ion Implantation in 4H-SiC Wafers by Photo-Modulated Reflectance Technique (abstract) PRESENTER: Dénes Ullrich |
Effect of scanning speed and laser power on the surface roughness of 8-inch laser-slicing SiC wafers (abstract) PRESENTER: Linlin Che |
A Study on Simplifying the Process by Using Multiple Epitaxy and Implantation Method to fabricate SiC Super Junction (abstract) PRESENTER: Han-Wei Chen |
Fluence-Dependent Interfacial Reactions in UV Laser Annealed NiAl/4H-SiC Contacts: Structural Expansion and Ohmic Performance (abstract) PRESENTER: Youngjae Park |
The effect of the vertical ultrasonic vibration on the blade dicing of the SiC wafer (abstract) PRESENTER: Youngkwan Kim |
Slurry-less Electrochemical Mechanical Polishing Characteristics of 4H-SiC in Weak Alkaline Electrolyte (abstract) PRESENTER: Aoi Kaneko |
Thermal oxidation of 4H-SiC (0001) in O2 and N2O: kinetics, interface electrical properties and induced strain (abstract) PRESENTER: Fabrizio Roccaforte |
Electrical and Optical characterization on H⁺ doped 4H-SiC Schottky diodes (abstract) PRESENTER: Melissa Lucia Scalisi |
Mechanism of Ni-based Silicide layer formation on 4H-SiC substrates via laser annealing (abstract) PRESENTER: Gyunseo Kim |
Comparative Study on Grinding Behavior of C-face and Si-face in Laser-Sliced 4H-SiC Wafers (abstract) PRESENTER: Bixue Li |
Investigation of silicon nitride based high-κ dielectrics for SiC power MOSFETs (abstract) PRESENTER: Sami Bolat |
Atom Probe Tomography for Highly Implanted Phosphorus Ion in Silicon Carbide (abstract) PRESENTER: Akio Kanayama |
Avalanche Stress Study of 4H-SiC Power Devices: Impact of Voltage Rating and Substrate for JBS and PiN Diodes (abstract) PRESENTER: Cyrille Le Royer |
Trench Superjunction (SJ) Platform Technology for SiC Power Devices (abstract) PRESENTER: Arne Benjamin Renz |
First Demonstration of LOCal Oxidation of SiC (LOCOSiC) isolation in 4H-SiC Power Devices - Using a 650 V JBS Diode as an Example (abstract) PRESENTER: Po-Han Wang |
Unveiling the Role of Crystallographic Defects in SiC Device Reliability Using Emission Microscopy and Etching-Based Structural Analysis (abstract) PRESENTER: Cristiano Calabretta |
2x Current Boosting Scheme in 3300 V 4H-SiC VDMOSFET (abstract) PRESENTER: Yuniarto Widjaja |
Study on the Current Hump in SiC MOSFETs Induced by False Turn‑on of the High‑Side Body Diode (abstract) PRESENTER: Taehyun Jang |
Modeling of the Physical Properties of 3C-SiC/4H-SiC Heterostructures for TCAD Simulation (abstract) PRESENTER: Tetsuo Hatakeyama |
Impact of cell design on switching performance of 1.7kVSiC VDMOSFET (abstract) PRESENTER: Shih Chiang Shen |
Calculation of the whole interface state density profile in SiO₂/SiC lateral MOSFETs (abstract) PRESENTER: Marco Zignale |
Characteristics of High Current Density 4H-SiC Barrier Schottky Diodes (abstract) PRESENTER: Lan Luo |
Challenges in Measuring Thin SiO₂ Layers on 4H-SiC via Spectroscopic Ellipsometry (abstract) PRESENTER: László Makai |
4H-SiC CMOS 2-bit Decoder Circuits for Harsh Environment Applications (abstract) PRESENTER: Shunto Higashi |
Suppression of short channel effects by LDD structure in 4H-SiC n-channel MOSFETs (abstract) PRESENTER: Kota Shimizu |
Optical Critical Dimension Metrology for the SiC Trench MOSFET Process (abstract) PRESENTER: Emeric Balogh |
'Ladder' design for improved static electrical characteristics for 1.2kV 4H-SiC MOSFET with deep P-well (abstract) PRESENTER: Skylar Deboer |
Study of Single-Event-Burnout for Refilled-PMOS SiC Trench MOSFET (abstract) PRESENTER: Haizhao Zhi |
A study on different SiC MOSFET Edge Termination Ruggedness (abstract) PRESENTER: Alfredo Walter Mario Guerrera |
Short-Circuit Reliability Analysis of SG-MOSFETs Versus Planar 4H-SiC MOSFETs (abstract) PRESENTER: Pei-Chun Liao |
An Improved Analytical Model for SiC P-i-N Diode Reverse Recovery (abstract) PRESENTER: Giorgian Borca-Tasciuc |
Temperature-Dependent TLM-Based Resistance Modeling for 4H-SiC CMOS (abstract) PRESENTER: Hui Wang |
Silicon Carbide Radiation Sensor under High Temperature and Defects Analysis with ODMR (abstract) PRESENTER: Lei Cao |
Pulsed optically detected magnetic resonance of silicon vacancies in SiC (abstract) PRESENTER: Yuichi Yamazaki |
4H-SiC Tunneling Light Emitter as a Light-Source for Monolithically Integrated Off-Resonant Excitation of Silicon Vacancies (abstract) PRESENTER: Jan Frederik Dick |
Demonstration of the first full-wave rectifier circuit on β-Ga₂O₃ diodes (abstract) PRESENTER: Sujin Kim |
Two-Step Growth of κ-Ga₂O₃ Thin Films on 4H-SiC Substrate Using Mist CVD with Temperature-Varied Buffer Layers (abstract) PRESENTER: Siyoung Bae |
Simulation Framework for Quantum Control Protocols in Spin-3/2 Silicon Vacancies of 4H-SiC (abstract) PRESENTER: Jun Jae Choi |
Oxidation effects on optical properties of Si and SiC photonic crystal nanocavities (abstract) PRESENTER: Heungjoon Kim |
Fabrication of CMOS-Compatible 4H-SiC UV-C Photodiodes Using Lateral Structures and Junction Engineering (abstract) PRESENTER: Sung-Woong Han |
Low-damage laser slicing technology for bulk GaN (abstract) PRESENTER: Xing Zhang |
Highly Stable Thin Film Transistors Based on Exfoliated β-Ga₂O₃ via RTP Annealing (abstract) PRESENTER: Jiheon Ha |
A SiC-based Desktop Quantum Computer (abstract) PRESENTER: Matthias Widmann |
Fabrication, Characterization, and Performance Assessment of GaN PiN Betavoltaic Cells (abstract) PRESENTER: Jaewon Park |
Towards High-Fidelity Quantum Gates for the V2 Defect in 4H-SiC (abstract) PRESENTER: Yihong Hu |
Modeling the Nucleation and Growth Kinetics of Heteroepitaxial Diamond on ALD-Al₂O₃/SiC via MPCVD (abstract) PRESENTER: Nhat-Minh Phung |
Excellent Temperature Stability of Al₀.₈₅Ga₀.₁₅N/Al₀.₅Ga₀.₅N HEMT (abstract) PRESENTER: Do-Hyeong Yeo |
A study of optical emission spectroscopy (OES) for high selective-etching in E-mode HEMT process (abstract) PRESENTER: Kyeong-Keun Choi |
Effect of Dynamic Reverse Bias on the Blocking Capability of SiC MOSFETs under Development (abstract) PRESENTER: Jiale Wu |
Temperature Dependence of the AC-BTI in SiC MOSFETs (abstract) PRESENTER: Kohei Takei |
Accumulated Threshold Voltage Shift Induced by Surge Current in Planar SiC MOSFETs After AC Gate Switching Stress (abstract) PRESENTER: Ke Wei |
Gate Oxide Stability and Degradation Modes of Next Generation SiC MOSFETs (abstract) PRESENTER: Reza Soleimanzadeh |
High-Bandwidth Measurement of Laser-Induced Transient Responses in SiC Devices for Understanding Single Event Burnout Phenomena (abstract) PRESENTER: Takahiro Makino |
Modelling Leakage Current Variations Based on Threshold Voltage Shift in SiC MOSFET Under Positive Gate Stress (abstract) PRESENTER: Giorgio Zappalà |
Reducing metal delamination in SiC devices by carbon removal (abstract) PRESENTER: Knut Gottfried |
Design Space Exploration of SiC Power Module Package via Surrogate Model (abstract) PRESENTER: Lu Wan |
Method for Improving Instability of Forward Voltage during Power Cycling Test about SiC Power Module (abstract) PRESENTER: Jangmuk Lim |
Modeling and Experimental Evaluation Comparing Normal to c-plane Stress-Strain of Two-Step ICP Etched Microstructures. (abstract) PRESENTER: David Spry |
17:00-17:30Break (30min)
Friday, September 19th
View this program: with abstractssession overviewtalk overview
08:30-10:00 Session 22A: Epitaxial Growth 2
Chairs:
Location: Convention Hall A+B, 1F
08:30 | Analysis of Burgers vectors of basal plane dislocations in 4H-SiC wafer with thick epitaxial layers (abstract) PRESENTER: Fumihiro Fujie |
08:45 | Thick epitaxial growth for detectors application (abstract) PRESENTER: Francesco La Via |
09:00 | Implementation of Growth Interrupt into Commercial Growth Process to Realize Low BPD Epilayers for High Power Devices (abstract) PRESENTER: Rachael Myers-Ward |
09:15 | Remote Epitaxy of SiC: Feasibility, Challenges, and Pathways (abstract) PRESENTER: Misagh Ghezellou |
09:30 | Epitaxial growth of 3C-SiC and 4H-SiC by travelling solvent method under isothermal conditions (abstract) PRESENTER: Boris Contri |
08:30-10:00 Session 22B: Interface Characterization
Chairs:
Location: Convention Hall C, 1F
08:30 | (Invited) Why SiO₂/SiC interface traps cannot be passivated efficiently? (abstract) |
09:00 | Extremely uniform surface potential near the valence band edge at nitrided 4H-SiC/SiO₂ interface (abstract) PRESENTER: Kyota Mikami |
09:15 | Physical Origin of Crystal Face-Dependent Electron Mobility in 4H-SiC (0001) and (11-20) MOSFETs (abstract) PRESENTER: Xilun Chi |
09:30 | A charge pumping study on interface trap creation in SiC trench MOSFETs during gate switching instability (abstract) PRESENTER: Marina Avramenko |
09:45 | The impact of NO annealing on the p-type SiC/SiO₂ interface: A LE- μSR study (abstract) PRESENTER: Maria Mendes Martins |
10:00-10:30Break (30min)
10:30-12:00 Session 23A: Interface Processing
Chairs:
Location: Convention Hall A+B, 1F
10:30 | Preliminary Study into Ferroelectric Properties of HfO₂/SiO₂ SiC MOS Capacitors for Improved Short Circuit Capability (abstract) PRESENTER: Xinkai Tian |
10:45 | Impacts of plasma nitridation on SiC surface (abstract) PRESENTER: Daiki Miura |
11:00 | Enhanced mobility in SiC (0001) MOSFETs using a decoupled plasma nitridation (DPN) process and oxide deposition (abstract) PRESENTER: Koushik Ramadoss |
11:15 | High-Temperature H₂- and N₂- containing Surface Conditioning for SiO₂/4H-SiC Interface Optimization (abstract) PRESENTER: Johannes Ziegler |
11:30 | Enhancing SiO₂/4H-SiC Interface Quality via In-Situ Plasma Pretreatment and Post-Deposition Annealing for Improved MOS Device Performance (abstract) PRESENTER: Mustafa Akif Yildirim |
11:45 | Carbon-related defect formation during high temperature Ar annealing in 4H-SiC enhanced by prior thermal oxidation and suppressed by H₂ annealing (abstract) PRESENTER: Chuyang Lyu |
10:30-12:00 Session 23B: Gate Reliability
Chairs:
Location: Convention Hall C, 1F
10:30 | (Invited) SiO₂ as the Gate Dielectric for SiC MOSFETs: An Unabridged Story (abstract) |
11:00 | Enhanced Gate Oxide Reliability in Vertical SiC Power MOSFETs via Optimized Screening (abstract) PRESENTER: Ayan Biswas |
11:15 | Mechanism of Threshold Voltage Drift in SiC MOSFETs under Bipolar AC Gate Stress via Photon-Assisted Electron Injection (abstract) PRESENTER: Ryosuke Shingo |
11:30 | High-Voltage Reliability Study for 3.3kV High-K SiC Planar MOSFETs (abstract) PRESENTER: Edoardo Ceccarelli |
11:45 | Peak Voltage and Switching Slope Dependency of Gate Switching Instability in SiC MOSFET (abstract) PRESENTER: Ruben Schnitzler |
12:00-13:15Lunch (75min)
13:15-15:00 Session 24A: Bulk Growth 3
Chairs:
Location: Convention Hall A+B, 1F
13:15 | (Invited) Stabilizing the Growth Interface in Solution Growth : Application of SiC-Saturated Conditions and Convection Control (abstract) PRESENTER: Takeshi Mitani |
13:45 | Development of High-quality 6-inch P-type 4H-SiC Substrates Using Solution Growth (abstract) PRESENTER: Yifan Dang |
14:00 | Reduction of Basal Plane Dislocations in 8-inch SiC Substrates Using Novel Crystal Growth Method Based on Batch Processing (abstract) PRESENTER: Hiroshi Fukui |
14:15 | Insights from 3D Modeling of SiC Solution Growth: Realization of Unidirectional Solution Flow and High Growth Rate by Asymmetric Hot-zone Designs (abstract) PRESENTER: Xin Liu |
14:30 | (Invited) The Cutting Edge and Future of Lab-Grown Diamonds (abstract) |
13:15-15:00 Session 24B: Quantum Sensing and Quantum Control
Chairs:
Location: Convention Hall C, 1F
13:15 | (Invited) Mitigating electrical and magnetic noise for SiC qubits and photonics (abstract) |
13:45 | Detection and characterization of divacancy-related defects in 4H-SiC by coherent photoelectrical spin readout at room temperature (abstract) PRESENTER: Naoya Morioka |
14:00 | Theory of optical spin-polarization and related ODMR contrast optimization strategy for an axial divacancy center in 4H-SiC (abstract) PRESENTER: Guodong Bian |
14:15 | PL6 centers in 4H-SiC for spin-based quantum sensing (abstract) PRESENTER: Raphael Woernle |
14:30 | All-electrical quantum magnetometry based on commercially off-the-shelf SiC devices (abstract) PRESENTER: Connor Fieweger |
14:45 | High-resolution nanoscale AC quantum sensing in SiC (abstract) PRESENTER: Paul Fisher |
15:00-15:15Break (15min)