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Author
:
Arne Benjamin Renz
Publications
Improved Angle Tolerance in 4H-SiC Trench Filling Epitaxy Using Chlorinated Chemistry
Rydhem Grover
,
Kelly Turner
,
Gerard Colston
,
Arne Benjamin Renz
,
Marina Antoniou
,
Peter Gammon
,
Phil Mawby
and
Vishal Shah
EasyChair Preprint 14947
Keyphrases
4H-SiC
,
Superjunction
,
Trench Filling Epitaxy
.
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