HomeEPiC SeriesKalpa PublicationsPreprintsFor AuthorsFor Editors

Author:Gerard Colston

Publications
Improved Angle Tolerance in 4H-SiC Trench Filling Epitaxy Using Chlorinated Chemistry
Rydhem Grover, Kelly Turner, Gerard Colston, Arne Benjamin Renz, Marina Antoniou, Peter Gammon, Phil Mawby and Vishal Shah
EasyChair Preprint 14947

Keyphrases

4H-SiC, Superjunction, Trench Filling Epitaxy.

Copyright © 2012-2025 easychair.org. All rights reserved.