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Author
:
Yukihiro Furukawa
Publications
Ion implanter and Activation Annealing for SiC devices
Yoshifumi Yamazaki
,
Thomas Simon
,
Takumi Yuze
,
Hideo Suzuki
,
Yukihiro Furukawa
and
Hidekazu Yokoo
EasyChair Preprint no. 533
Keyphrases
Activation annealing
,
Aluminium ion/
,
Hi temperature implantation/
,
Room temperature implantation/
.
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