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![]() Title:Chasing Front-End-Of-Line Defects with Cell-Aware Diagnostics in High-Volume Manufacturing Authors:Saghir Shaikh, Lay Hoon Loh, Brandon Brea, Palanisamy Prakash, Gaurav Devrani, Jim Lee, Muhammad Waheed and Giyoung Yang Conference:ITC 2025 Tags:DFM and Test Diagnosis, Diagnosis, Physical Failure Analysis, Pre-Silicon/Post-Silicon and Yield Analysis and Optimization Abstract: Cell-aware diagnostics identify Front-End-Of-Line (FEOL) defects in standard cells, aiding Physical Failure Analysis (PFA) and enhancing root-cause analysis. Our findings show that cell-aware diagnostics often reduce suspect areas to under 1% of the total cell area. Given the significant space cells occupy, cell faults can be a major failure mechanism. These benefits led us to create a high-volume manufacturing-friendly scan diagnostics infrastructure using cell-aware diagnostics. We present data-driven solutions for implementing and maintaining this infrastructure. We also include the results of six PFA samples, which validate the FEOL defects across four designs and three technology nodes, yielding six successful results. Chasing Front-End-Of-Line Defects with Cell-Aware Diagnostics in High-Volume Manufacturing ![]() Chasing Front-End-Of-Line Defects with Cell-Aware Diagnostics in High-Volume Manufacturing | ||||
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