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![]() Title:Modulation of HCI in I/O Analog Devices Through Process Specifications Authors:Cheikh Diouf, Alain Bravaix, Xavier Federspiel, Celestin Doyen, Victor Yon, Leo Basset and Xavier Garros Conference:IIRW-2023 Tags:Analog device, Arsenic, HCI, Nitridation and Phosphorus Abstract: Hot carrier injection (HCI) is one of the more significant reliability issues in advanced CMOS technologies. If it is more and more critical in thin gate-oxides due to gate-length scaling although supply voltage is reduced, it is more problematic in thicker gate-oxide due to high voltages operation needed for input/output (I/O) devices. In this paper, we discuss important process steps from the fabrication line that may modulate HCI damage in thick gate-oxides MOSFETs dedicated to analog operation. Modulation of HCI in I/O Analog Devices Through Process Specifications ![]() Modulation of HCI in I/O Analog Devices Through Process Specifications | ||||
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