Download PDFOpen PDF in browserCeramic Oxide Thin Film Thermocouples for Ployimide-based Flexible SubstanceEasyChair Preprint 29703 pages•Date: March 15, 2020AbstractA ceramic oxide thin film thermocouples (TFTCs) is designed and fabricated by RF magnetron sputtering on the flexible substrate-Polyimide (PI) and its thermoelectric characteristics are investigated via analog simulation and multiple measurements. A kind of system for calibration and testing thermocouples in the low-temperature is designed. The prepared TFTCs show ideal static characteristics when the temperature changes between 10 and 200℃. The temperature resolution is less than 0.2℃ and the maximum thermoelectric output at 200℃ is 4.62mV. The maximum repeatability error, maximum temperature drift rate and average Seebeck coefficient of the flexible TFTCs can reach to 1.23%, 7.792℃/h and 23.1mV/℃. Keyphrases: TFTCs, flexible, thermoelectric properties
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