Ceramic Oxide Thin Film Thermocouples for Ployimide-based Flexible Substance

EasyChair Preprint no. 2970

Abstract

A ceramic oxide thin film thermocouples (TFTCs) is designed and fabricated by RF magnetron sputtering on the flexible substrate-Polyimide (PI) and its thermoelectric characteristics are investigated via analog simulation and multiple measurements. A kind of system for calibration and testing thermocouples in the low-temperature is designed. The prepared TFTCs show ideal static characteristics when the temperature changes between 10 and 200℃. The temperature resolution is less than 0.2℃ and the maximum thermoelectric output at 200℃ is 4.62mV. The maximum repeatability error, maximum temperature drift rate and average Seebeck coefficient of the flexible TFTCs can reach to 1.23%, 7.792℃/h and 23.1mV/℃.

Keyphrases: flexible, TFTCs, thermoelectric properties

@Booklet{EasyChair:2970,
  author = {Zhaojun Liu and Bian Tian and Jiangjiang Liu and Zhongkai Zhang and Qijing Lin and Zhuangde Jiang and Qi Mao and Niancai Peng},
  title = {Ceramic Oxide Thin Film Thermocouples for Ployimide-based Flexible Substance},
  howpublished = {EasyChair Preprint no. 2970},

  year = {EasyChair, 2020}}